ralrule,highconductivitymetalandlowlossdielectricmaterialshouldbeused.Inadditiontothisrequirement,thestructureoftheinductorshouldfacilitatetheimplementationofPDMA.Theverticalplanarcoilinductorutilizesone-portcoplanarwaveguide(CPW)configurationwithtestpads(Ground-Signal-Ground)withapitchofμm.Thethreetestpadsalsoserveastheanchoroftheverticalinductorsonthesubstrate..MaterialConsiderationGoldisusedasthematerialforthebottomconductor(thecoil).Goldisaductilematerialwithhighconductivity.ItisanidealplasticdeformationmaterialfortheimplementationofPDMA.Copperisselectedasthematerialofthetopconductor(thebridge).Copperisalsoahighconductivitymetalanditsprocessingiscompatiblewiththegoldbottomconductorduringthefabrication.SiliconoxideandnitridearegooddielectricmaterialsavailableinsiliconICprocess.However,theyarenotsuitableforverticalplanarcoilinductorsduetohighinternalstressandpooradhesiononmetalsurface.CYTOPamorphou硅和氮化物是硅集成电路中理想绝缘材料。
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